Handbook of Multilevel Metallization for Integrated Circuits (Materials Science and Process Technology Series)
The Handbook of Multilevel Metallization for Integrated Circuits answers and important want by pulling together in one volume a thorough technical summary of each of the crucial areas that make up a multilevel metal method. Included are linked design and style, analysis, supplies, and manufacturing topics. The book then serves 3 purposes: It functions as a great mastering tool for the engineer newly assigned to work in metallization It serves as a reference text for any Network marketing engineer, new or skilled, who wishes to refresh their memory. For someone who desires to additional specialize in one topical areas, an substantial listing of references has been supplied.
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EUV Sources for Lithography (SPIE Press Monograph Vol. PM149)
This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV supply technologies. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV supply area. Matters array from a state-of-the-art overview and in-depth explanation of EUV source needs, to basic atomic information and theoretical models of EUV sources based mostly on discharge-created plasmas (DPPs) and laser-produced plasmas (LPPs), to a description of prominent DPP and LPP models and other technologies for generating EUV radiation. Extra topics include EUV supply metrology and components (collectors, electrodes), debris mitigation, and mechanisms of element erosion in EUV sources. The volume is meant to meet the needs of the two practitioners of the engineering and readers in search of an introduction to the topic.
Contents
– Preface
– Introduction
– List of Contributors
– Checklist of Abbreviations
– Introduction and Technology Evaluation
– Fundamentals and Modeling
– Plasma Pinch Sources
– Laser-Made Plasma (LPP) Sources
– EUV Supply Metrology
– Other Kinds of EUV Sources
– EUV Supply Elements
– Index
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